The FF-1000 automatic spectroscopic ellipsometer was specifically
designed for the display industry and is able to handle
up to 5th generation glass substrate.
The FF-1000 allows accurate and fast characterization
of thickness, optical constants and uniformity for advanced
display device applications. It also supports production
processes for next generation FPDs such as low-temperature
polysilicon in TFT (Thin Film Transistors) and organic
EL (Organic Electro Luminescence) processes.
The phase modulated technology is the most suitable for
accurate thin film measurement on transparent substrates
as the software includes advanced capabilities for automatic
correction of backside reflections.
The FF-1000 automatic spectroscopic ellipsometer is highly
featured including: precision motorized stage, robust pattern
recognition software, and optional spectroscopic reflectometer.
Advanced
Thin Film Metrology Platform for Display Technology
