The DIGISCREEN is an automated Spectroscopic Reflectometer
platform ideally suited for R&D and pilot production
of flat panel displays.
Its unique compact design provides a sample holder almost
vertical allowing easier integration and a smaller footprint
and is able to handle up to 7th generation substrates.
The DIGISCREEN spectroscopic reflectometer allows extremely
fast and accurate measurements of film thickness and uniformity
over large area flat panel displays.
The easy-to-use, robust Windows® based software integrates
push button recipe for automatic film homogeneity maps
and reprocessing capability.
The
Smallest Footprint Film Metrology Platform
