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PZ2000 Laser Ellipsometer
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 Cost
Effective Laser Ellipsometer for Simple Applications
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High precision, cost effective table
top laser ellipsometer for research
and industrial quality control applications
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10 µm
microspot useful for patterned samples found in
semiconductor and
biological applications
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Fully upgradeable: up to 3
wavelengths, motorized
sample stage, autofocus,
pattern recognition, DUV
spectroscopic reflectometer
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Cost effective
The PZ2000 is a cost effective laser
ellipsometer that allows accurate characterization
of film thickness and optical constants,
and is especially suited to transparent
films such as oxides, nitrides, high
k and low k dielectrics.
The PZ2000 laser ellipsometer delivers
the highest performance in terms of
accuracy and repeatability. Single
layer films can be measured to sub-angstrom
precision.
The modular design makes it easy for
users to upgrade to enhance its performance
and range of applications. The use
of several wavelengths (up to three)
eliminates film thickness ambiguity
as well as increases sample information
needed for absorbing film analysis.
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Characterization
of thickness and optical constants for:
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Transparent films: oxides, nitrides, DL carbon, ARC
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Absorbing films: poly and a-silicon, polymer, resists
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